Systematic Control Exploitation for Critical Dimension and Overlay in Photolithography Technology 光刻工艺中对线宽和套刻系统性控制的开发
The Analysis of Critical Points of Kramers System in High Dimension 高维Kramers系统的奇点分析
What is important is that there is a critical gender dimension to this. 重要的是这里面还有关键的性别问题。
Super-cooling solidification happened because the critical nucleus of ice is of large dimension. 纯水的临界冰核尺度较大,发生过冷凝固;
The relation between critical dimension of Minkowski space and the rank of internal nonabelian gauge group is given. 给出Minkowski空间的临界维数与内部非阿贝尔规范群的秩的关系。
Extreme ultraviolet lithography ( EUVL) is one of the promising technologies for the fabrication of critical dimension of 100~ 32 nm. The optical performance of projection optics is most important to realize the fabrication of high resolution pattern. 极端紫外光刻(EUVL)作为实现100~32nm特征尺寸微细加工的优选技术,其光刻物镜的光学性能是实现高分辨图形制作的关键。
The critical pressure for preparation is related to the dimension of SiC particles and extent of the reaction. 临界熔渗压力与SiC颗粒尺寸及反应程度有关。
A Reflection on the Pleasant Sensual Enjoyment in Everyday Life Aesthetics& in accordance with Adorno's critical dimension 对日常生活审美化中快感享受的反思&遵从阿多诺的批判维度
This essay borrows the theory of Frankfurt School in Critical methods to deeply analyze dystopia literature, involving political and aesthetic dimension of dystopia literature. 本篇论文在批评方法上借用了法兰克福学派的理论,对反面乌托邦文学进行深入分析,涉及了反面乌托邦文学的政治和美学等维度。
Furthermore, we also provide a method for critical nodes selection based on modal analysis, which aims at reducing the huge dimension of injection space. 基于模态分析,提出了选择系统关键节点的方法,以实现注入空间的有效降维。
GIS supports data warehouse integration of public utilities. Geo-dimension is the critical dimension besides the production-dimension-. time-dimension and user-dimension. 城市公用事业领域数据仓库的集成需要地理信息系统的支持,地理维是数据仓库维设计中除了产品维、时间维和用户维的关键维度,地理维的设计与企业地理信息系统是一致的。
The main content in the first to the fourth chapter is focused on the critical study on the dimension of philosophy of art of Western modern hermeneutics. 第一章对作为现代诠释学哲学前史的古代诠释学及近代诠释学与艺术之间的关联进行简单的历史回顾。
Two criteria for determining the critical parameter values of period doubling bifurcation or Hopf bifurcation of a general four dimension mapping system are presented in this paper. 本文分别研究了含多参数的四维映射系统的周期倍化分叉和Hopf分叉的参数临界值的代数判据。
The result shows that, the critical point of the Gauss model depends not only on the spatial dimension of the system, but also on the coordination number of the site. 结果表明,系统的临界点不仅与空间维数有关,还与晶格格点的配位数有关;
There is obvious critical dimension ( CD) loss in the high density RIE technology, which decreases the sensibility and stability of MEMS devices, especially for the small dimension MEMS structures. 在高密度反应离子刻蚀技术中,存在明显的线宽损失,对小尺寸MEMS结构影响很大,将使MEMS器件灵敏度下降,稳定性降低。
The Ising model on a family of Koch curves is studied by the renormalization group method. The critical exponents of the systems are obtained. The authors found that the critical exponents α,γ,η only depend on the fractal dimension of the fractals. 利用重整化群变换的方法,研究了一族Koch曲线上Ising模型的临界性质,求得了系统的临界指数,发现临界指数只与Koch曲线的分形维数有关。
The channels of social mobility, or in other words the institutional arrangements underpinning social mobility, are a critical dimension of the overall institutional foundation of economic growth, because the channels of social mobility are what underpins the incentive structure in the positional market. 社会流动渠道,或说支撑社会流动的制度安排,是经济增长的整个制度基础中的一个关键维度,因为它调控地位市场的激励结构。
Critical Dimension ( CD) deviation caused by the different latent image contrast is also experimentally monitored using two different photoresists. 同时,采用2种不同抗蚀剂实验监测了不同潜像对比度引起的关键尺寸(CD)偏差。
There is a maximum critical value in the cylindrical shell of certain dimension. 研究发现,一定尺寸的圆柱壳有一个最大临界值。
As a critical dimension, it opens the space of the possibility wide for Man's historical development and leads the contemporary Chinese society to make the correct choices in the dialectical unity of the reality and the ideal of Man's all-round development. 作为一个批判性的维度,它为人类的历史发展敞开了可能性的空间,并引导当代中国人和中国社会在人的全面发展的现实和理想的辩证统一中做出正确的选择。
The size of the particles prepared by sol-gel method is little bigger than critical dimension and accordingly these samples have relatively high coercivity. 溶胶凝胶法制备的样品因粒子的粒径稍高于临界尺寸而显示出相对较高的矫顽力。
Research of critical dimension loss control in the ICP etch of deep Silicon trenches ICP硅深槽刻蚀中的线宽控制问题研究
With the development of lithography technology, alignment lithography systems with nanometer critical line-width dimension require higher alignment accuracy. 随着光刻机技术水平的提高,特征线宽的尺寸减小到纳米级,对光刻机对准系统提出了更高对准精度的性能指标。
With the decreasing of critical dimension, the influence of chip defects on yield is more and more serious. 随着集成电路工艺尺寸的减小,制造缺陷对芯片成品率的影响越来越大。
With the development of microelectronics technology, including large-scale integrated circuits, photonic crystal materials and devices. The critical dimension of these structures has been in the size of nanotechnology. 微电子技术领域,包括大规模集成电路,光子晶体材料及器件的发展使其关键技术尺寸开始进入纳米技术领域。
In this research, the author got the relationships of Critical dimension of poplar dying, the length of wood, equivalent diameter, drying temperature, pressure and so on. ( 3) Determination the poplar temperature and humidity field characteristic of vacuum superheat steam. 对杨木在真空过热蒸汽干燥状态下的临界尺寸问题进行系统研究。研究表明:杨木真空干燥临界尺寸的大小与木材的长度、当量直径、干燥温度、环境压力等因素有关。
With the development of "scaling" in Integrate Circuit, the critical dimension reduces continuously. 随着集成电路按比例缩小趋势的不断发展,刻线临界尺寸不断减小。
The development of integrated circuits is the progress of integration level. The smaller critical dimension means the better chip performance and lower cost. 集成电路的发展是芯片集成度不断提高的过程,更小线宽尺寸的芯片代表了更高的性能、更低的成本。
Among them, the idealized pre-existence structure may dimensions including cognitive dimensions, critical dimensions, management dimension and the decision dimension. 其中,理想化先在结构的可能维度包括内容维度、层次维度、批判维度和管理维度。